- FEM analyses of triple-beam silicon sensors with piezo electric thin-films
- Silizium-Dreifachstimmgabel mit piezo-elektrischer ZnO-Dünnschicht
- monocrystalline Silicon / single-crystal silicon / Si(100)
- https://tfconsult.com/innovative-sensor-design/
- https://www.sciencedirect.com/science/article/abs/pii/0924424794800154?via%3Dihub
- https://tfconsult.com/verbundforschung-mikrosystemtechnik/
- https://tfconsult.com/comett-course-resonant-microsensors/
- https://tfconsult.com/si-kraftsensoren-mit-piezoelektrischem-antrieb/